多片水平放置晶圆盒

上下盖内环设计有效减少晶圆横向移动，同时确保不会压到晶圆边缘。

Upper lid and lower base match separator ring design effectively reduces wafer lateral movement while ensuring that it does not press to wafer edges.

设计符合制程设备自动接口。

The design conforms to the automatic interface of process equipment.

锁扣安全系统和内环抗冲击空间设计，给圆运输过程中提供有效保护。

Lock catch secure system and inner side impact resistant space design provide effective protection during wafer transportation.