Horizontal_Wafer_Canister

Horizontal_Wafer_Canister

Product Details


Upper and lower cover inner ring design effectively reduces wafer lateral movement while ensuring that it does not press to wafer edges.
Lock catch secure system and inner side impact resistant space design provide effective protection during wafer transportation .
It can effectively reduce the overall weight while optimizing the product design.
The design conforms to the automatic interface of process equipment.
Wafer Size Material Surface Resistance Internal Diameter Internal height
6″ (150mm) Antistatic PP

10E4Ω-10E11Ω

151mm 44mm
8″ (200mm) Antistatic PP 10E4Ω-10E11Ω 201mm 44mm
12″ (300mm) Antistatic PP 10E4Ω-10E11Ω 301mm 71mm