Wafer Size | Material | Surface Resistance | Internal Diameter | Thickness |
4″(100mm) | Antistatic Foam | 10E6Ω-10E11Ω | 100mm | 3-6mm |
5″(125mm) | Antistatic Foam | 10E6Ω-10E11Ω | 125mm | 3-6mm |
6″(150mm) | Antistatic Foam | 10E6Ω-10E11Ω | 150mm | 3-6mm |
8″ (200mm) | Antistatic Foam | 10E6Ω-10E11Ω | 200mm | 3-6mm |
12″(300mm) |
Antistatic Foam | 10E6Ω-10E11Ω | 300mm | 3-6mm |